wafer out temp.
balaji at sunray.snffab.stanford.edu
Mon Sep 17 10:37:16 PDT 2001
Please make sure the wafer out temp (under "Recipe Edit Parameters") does not
exceed 300C in the AG4108, or it might burn up the metal ring on the robot arm
(besides causing a $1000 repair). I noticed a user over the weekend had turned
up the wafer out temp. to 520C. THIS IS A RECIPE GUARANTEED TO BURN THE RING.
Please be a little patient till the wafer cools to below 300C.
More information about the AG4108