From chion at stanford.edu  Wed May 15 09:59:21 2002
From: chion at stanford.edu (Chi On Chui)
Date: Wed, 15 May 2002 09:59:21 -0700 (PDT)
Subject: change tray
Message-ID: <Pine.GSO.4.44.0205150958190.5068-100000@saga6.Stanford.EDU>

Hi,

Is there any objection to switch the tray to oxidation by tomorrow
morning?

/Chi On (5-3612)



From ychliu at stanford.edu  Thu May 16 13:25:58 2002
From: ychliu at stanford.edu (Yaocheng Liu)
Date: Thu, 16 May 2002 13:25:58 -0700 (PDT)
Subject: Tray switch delayed
Message-ID: <Pine.GSO.4.44.0205161323470.4952-100000@saga21.Stanford.EDU>

The tray switch from silicidation to oxidation has been delayed to
tomorrow after lunch time.
Thanks.

Yours,

Yaocheng




From booth at snf.stanford.edu  Fri May 17 15:14:01 2002
From: booth at snf.stanford.edu (Len Booth)
Date: Fri, 17 May 2002 15:14:01 -0700
Subject: AG4108 quartzware change
Message-ID: <3CE580A9.A20C936A@snf.stanford.edu>

Users -
	The silicide quartzware has been changed
to oxidation, and the sign & cassettes have been
changed also.		Len


From song.pang at intel.com  Wed May 22 16:39:40 2002
From: song.pang at intel.com (Pang, Song)
Date: Wed, 22 May 2002 16:39:40 -0700
Subject: Highest acceptable temperature on RTA machine
Message-ID: <D1C0BF20D4AFD411AB98009027AE9988093F2E17@fmsmsx40.fm.intel.com>

Dear AG4108 RTA users and staffs,

Does anyone know about the highest acceptable temperature on AG4108?
Basically, I would like to run 5min Ar or N2 anneal at 1200 degree C.  Is it
acceptable?  

If you know any information, please let me know.  That will be very helpful.
Thanks!

Song
(408) 307- 4896


From takamura at stanford.edu  Thu May 30 14:28:34 2002
From: takamura at stanford.edu (Yayoi Takamura)
Date: Thu, 30 May 2002 14:28:34 -0700 (PDT)
Subject: Tray change to silicide
Message-ID: <Pine.LNX.4.44.0205301426280.6503-100000@cardinal2.Stanford.EDU>

Hi,

I would like to have the RTA AG4108 switched over to the silicide tray
next Tuesday.  Please let me know if that is a problem with your
processing.  I will most likely need it in that configuration for a couple
of days.

Thanks,

Yayoi

****************************************************************
Yayoi Takamura
CISX Building, Room 300
Stanford University
Stanford, CA  94305
(650) 725-0418
takamura at leland.stanford.edu
www.stanford.edu/~takamura/
****************************************************************