Highest acceptable temperature on RTA machine

Pang, Song song.pang at intel.com
Wed May 22 16:39:40 PDT 2002


Dear AG4108 RTA users and staffs,

Does anyone know about the highest acceptable temperature on AG4108?
Basically, I would like to run 5min Ar or N2 anneal at 1200 degree C.  Is it
acceptable?  

If you know any information, please let me know.  That will be very helpful.
Thanks!

Song
(408) 307- 4896



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