NH3 to AG4108 unavailable until next week

Len Booth booth at snf.stanford.edu
Tue Jul 29 11:35:54 PDT 2003

AG4108 users -
	The NH3 to the annealer is shared with the
Nitride LPCVD tube.  To co-ordinate repair work for
the NH3 source we need to schedule the repairs next
week when the Nitride tube is down for repair.
Earliest availability expected for NH3 to the
AG4108 would be late Tuesday Aug 6th, but Wednesday
Aug 7th would be more likely.

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