From rcrane at snf.stanford.edu  Mon Mar 10 17:33:08 2003
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Mon, 10 Mar 2003 17:33:08 -0800
Subject: HEPA air shutdown tylan1-4, wbgaas, AG4108
Message-ID: <3E6D3CD4.DF4338E4@snf.stanford.edu>

Tylan1-4, wbgaas and ag4108 users,

HEPA air to tylan, bank 1 furnaces (tylan1-4), wbgaas and the ag4108
will interrupted on Tuesday, March 18, from 7:00am to 2:00pm. Facilities
will be installing a new variable speed drive controller for the
transfer fan which supplies this area. HEPA air flow will be reduced to
make-up air flow only (about 10-20% of normal flow). The wet bench
exhaust flow will not be affected by this action. Users with a high
sensitivity to particle contamination are advised to not load or unload
furnaces during the shutdown time.

Thanks for your help and patience,

Dick



From angela.mcconnell at stanford.edu  Wed Mar 19 16:54:09 2003
From: angela.mcconnell at stanford.edu (Angie McConnell)
Date: Wed, 19 Mar 2003 16:54:09 -0800
Subject: AG4108:  tray change to oxidation
Message-ID: <5.1.0.14.2.20030319165135.00a3b0b0@adm11.pobox.stanford.edu>

Hi,

I would like to have the AG4108 tray changed over to oxidation.  Please let 
me know if there are any objections.

Thanks,
Angie



From chion at stanford.edu  Mon Mar 24 11:34:42 2003
From: chion at stanford.edu (Chi On Chui)
Date: Mon, 24 Mar 2003 11:34:42 -0800 (PST)
Subject: Tray change request
Message-ID: <Pine.GSO.4.44.0303241047300.16743-100000@elaine7.Stanford.EDU>

Hi All,

Seems like couple of groups are lining up for oxidation tray. I should be
done by this afternoon. If there's no objection, they would like to have
the tray change back to oxidation by tmr morning.

Thanks!

/Chi On



From EvelynHug at aol.com  Mon Mar 24 12:28:13 2003
From: EvelynHug at aol.com (EvelynHug at aol.com)
Date: Mon, 24 Mar 2003 15:28:13 -0500
Subject: RTA
Message-ID: <7AA39D3A.51A1EAD3.02469223@aol.com>

I would like the tray changed to oxide if that's ok with everyone....thanks...evelyn


From booth at snf.stanford.edu  Tue Mar 25 10:14:34 2003
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 25 Mar 2003 10:14:34 -0800
Subject: AG4108 quartzware change
Message-ID: <3E809C8A.13E09BC3@snf.stanford.edu>

The wafer tray has been changed from silicide
to oxidation, and the cassettes & sign have been 
changed also.
			Len


From ychliu at stanford.edu  Fri Mar 28 15:08:43 2003
From: ychliu at stanford.edu (Yaocheng Liu)
Date: Fri, 28 Mar 2003 15:08:43 -0800
Subject: RTA tray change to silicide
Message-ID: <3E84D5FB.1444E10F@stanford.edu>

Hi,

I would like to ask for a tray change from oxidation to silicide on
Monday afternoon. Please let me know if there is any conflict.
Thanks.

Yaocheng



From chion at stanford.edu  Mon Mar 31 10:15:13 2003
From: chion at stanford.edu (Chi On Chui)
Date: Mon, 31 Mar 2003 10:15:13 -0800 (PST)
Subject: Reservation this morning cancelled.
Message-ID: <Pine.GSO.4.44.0303311014170.17910-100000@elaine7.Stanford.EDU>


Sorry for late notice as I was expecting a tray change to occur this
morning.

/Chi On