AG4108 chamber check

Uli Thumser uli at snf.stanford.edu
Tue Feb 10 17:56:42 PST 2004


Dear AG4108 users:

Here comes a little change for the AG4108 procedure:

Please inspect the chamber before and after using the AG4108:
Go to the Main Menu and enter the Manual page.
Go to the second page by pressing Next.
Press the Door Open command to open the door. Use a flash light to
inspect the inside of the chamber to make sure there is no piece or any
film left. Shutdown AG4108 on Coral if you recognize anything unusual.
Close the door by pressing Door Close afterwards and click on Exit to go
back to the Main Menu.

Please contact me if you need any help with this new procedure.

And remember, fill out the logsheet after each run!!!

Thank you,
Uli

--
Uli Thumser
Stanford Nanofabrication Facility
Center for Integrated Systems
420 Via Palou Mall, CIS Room 146
Stanford, CA  94305
(650)725-3694
uli at snf.stanford.edu





More information about the AG4108 mailing list