A. Alvin Barlian
barlian at stanford.edu
Sat Jul 17 18:08:52 PDT 2004
I ran RTA on 7 wafers this afternoon. Everything went well, the
process/chart looks great, etc. When it's done, I took the receiver
cassette out, tranfered the wafers, and replaced the cassette back in. I
could not touch the screen to go back to the Main Menu to turn off air,
water, etc. It seems that the screen freezed.
Does any of you know how to unlock the screen so that I can go back to the
Main Menu and shut down the machine properly?
Thanks a bunch,
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