From sjain at stanford.edu  Tue Mar  9 12:51:17 2004
From: sjain at stanford.edu (sameer jain)
Date: Tue, 9 Mar 2004 12:51:17 -0800
Subject: tray change
Message-ID: <006301c40618$44cd6630$f26340ab@SAMEER>

Hi all,
   I would like to request Elmer/Ray to change the RTA tray to oxidation
tomorrow (if needed it can be changed back to silicide at the end of the
day). Please let me know if you have any objections
 
Sameer
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From seymour at snf.stanford.edu  Wed Mar 10 08:13:03 2004
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Wed, 10 Mar 2004 08:13:03 -0800
Subject: tray change
Message-ID: <404F3E8F.990F0715@snf.stanford.edu>

The tray was changed to Oxidation



From uli at snf.stanford.edu  Wed Mar 10 08:57:17 2004
From: uli at snf.stanford.edu (Uli Thumser)
Date: Wed, 10 Mar 2004 08:57:17 -0800
Subject: silicide tray clean
Message-ID: <404F48EC.C0591638@snf.stanford.edu>

AG4108 users,

we had to pull out the silicide tray for a clean since we have some
contamination issues

Uli

--
Uli Thumser
Stanford Nanofabrication Facility
Center for Integrated Systems
420 Via Palou Mall, CIS Room 146
Stanford, CA  94305
(650)725-3694
uli at snf.stanford.edu




From chion at stanford.edu  Tue Mar 16 08:39:50 2004
From: chion at stanford.edu (Chi On Chui)
Date: Tue, 16 Mar 2004 08:39:50 -0800 (PST)
Subject: tray change to silicide this afternoon?
Message-ID: <Pine.GSO.4.44.0403160835190.8124-100000@elaine7.Stanford.EDU>

Dear AG4108 users,

Please let us know if there's an objection to swtich back to the silicide
tray by this afternoon. Thanks!

/Chi On



From barlian at stanford.edu  Thu Mar 18 22:41:30 2004
From: barlian at stanford.edu (A. Alvin Barlian)
Date: Thu, 18 Mar 2004 22:41:30 -0800 (PST)
Subject: oxidation tray
Message-ID: <Pine.GSO.4.44.0403182239110.8740-100000@elaine12.Stanford.EDU>


Does anybody mind if I request Elmer to put on the oxidation tray on
Friday?


Thanks,
Alvin




From rohits at stanford.edu  Thu Mar 18 22:47:39 2004
From: rohits at stanford.edu (Rohit Sudhir Shenoy)
Date: Thu, 18 Mar 2004 22:47:39 -0800 (PST)
Subject: oxidation tray
In-Reply-To: <Pine.GSO.4.44.0403182239110.8740-100000@elaine12.Stanford.EDU>
Message-ID: <Pine.GSO.4.44.0403182246280.8848-100000@elaine24.Stanford.EDU>


Hi,

I would like to second that request - I will need to use the RTA
(oxidation tray) on Saturday.

 thanks,
 --
  Rohit


On Thu, 18 Mar 2004, A. Alvin Barlian wrote:

>
> Does anybody mind if I request Elmer to put on the oxidation tray on
> Friday?
>
>
> Thanks,
> Alvin
>
>
>



From chion at stanford.edu  Thu Mar 18 23:41:22 2004
From: chion at stanford.edu (Chi On Chui)
Date: Thu, 18 Mar 2004 23:41:22 -0800 (PST)
Subject: I will need the silicide tray till 10am on Fri.
Message-ID: <Pine.GSO.4.44.0403182340560.29053-100000@elaine7.Stanford.EDU>




From chion at stanford.edu  Mon Mar 22 13:26:03 2004
From: chion at stanford.edu (Chi On Chui)
Date: Mon, 22 Mar 2004 13:26:03 -0800 (PST)
Subject: tray change request to silicide
Message-ID: <Pine.GSO.4.44.0403221323330.207-100000@elaine7.Stanford.EDU>

Dear 4108 users,

Since Alvin won't be ready for oxidation tray till wed morning, I would
like to request the tray change to silicide for tomorrow's use. Please
advise if that would interfere with your schedule.
Thanks!

/Chi On



From ychliu at stanford.edu  Mon Mar 22 15:53:22 2004
From: ychliu at stanford.edu (Yaocheng Liu)
Date: Mon, 22 Mar 2004 15:53:22 -0800
Subject: tray change request to silicide
References: <Pine.GSO.4.44.0403221323330.207-100000@elaine7.Stanford.EDU>
Message-ID: <000501c41068$dc62eb50$5f6340ab@plumbpc5>

Hi Alvin,

If the tray would be changed to silicidation tomorrow, is it ok to postpone
your run to Thursday? I would like to use silicidation tray too and my
wafers would be ready on Wednesday.
Thanks.

Yaocheng

----- Original Message ----- 
From: "Chi On Chui" <chion at stanford.edu>
To: <ag4108 at snf.stanford.edu>
Cc: "Arnoldus Alvin Barlian" <barlian at stanford.edu>
Sent: Monday, March 22, 2004 1:26 PM
Subject: tray change request to silicide


> Dear 4108 users,
>
> Since Alvin won't be ready for oxidation tray till wed morning, I would
> like to request the tray change to silicide for tomorrow's use. Please
> advise if that would interfere with your schedule.
> Thanks!
>
> /Chi On
>