silicide tray clean

Uli Thumser uli at
Wed Mar 10 08:57:17 PST 2004

AG4108 users,

we had to pull out the silicide tray for a clean since we have some
contamination issues


Uli Thumser
Stanford Nanofabrication Facility
Center for Integrated Systems
420 Via Palou Mall, CIS Room 146
Stanford, CA  94305
uli at

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