tray change request to silicide

Yaocheng Liu ychliu at
Mon Mar 22 15:53:22 PST 2004

Hi Alvin,

If the tray would be changed to silicidation tomorrow, is it ok to postpone
your run to Thursday? I would like to use silicidation tray too and my
wafers would be ready on Wednesday.


----- Original Message ----- 
From: "Chi On Chui" <chion at>
To: <ag4108 at>
Cc: "Arnoldus Alvin Barlian" <barlian at>
Sent: Monday, March 22, 2004 1:26 PM
Subject: tray change request to silicide

> Dear 4108 users,
> Since Alvin won't be ready for oxidation tray till wed morning, I would
> like to request the tray change to silicide for tomorrow's use. Please
> advise if that would interfere with your schedule.
> Thanks!
> /Chi On

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