Tray change to silicide

Alissa M. Fitzgerald amf at
Wed Feb 2 12:38:57 PST 2005

Hi Abhijit,

Would you be able to wait a day or two? At the latest until Monday?  I have
been waiting patiently for the tool for about a week - I need the oxide
tray.  If the tool comes up today, I can run my process tomorrow and then
it's all your after that.  Let's keep in touch.


> -----Original Message-----
> From: Abhijit Pethe [mailto:pethe at] 
> Sent: Wednesday, February 02, 2005 11:12 AM
> To: ag4108 at
> Cc: eenriquez at
> Subject: Tray change to silicide
> Hi AG4108 users,
> I would like to request a tray change to silicide for my run 
> tommorrow.
> Please contact me if you have any objections.
> Thanks
> Abhijit

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