From riteshj at ee.ucla.edu  Thu Jul 14 16:52:47 2005
From: riteshj at ee.ucla.edu (Ritesh J)
Date: Thu, 14 Jul 2005 16:52:47 -0700 (PDT)
Subject: Question regarding the RTO process
Message-ID: <Pine.GHP.4.58.0507141648390.22436@hplab01.ee.ucla.edu>

hello,
	i was wondering if anyone has tested the quality of the oxide
grown using the RTO process. I want to know how it compares to thermal
oxidation, (in terms of leakage and ability to be used as gate oxide).
Thanks a lot

Ritesh J



From rcrane at snf.stanford.edu  Tue Jul 26 11:43:19 2005
From: rcrane at snf.stanford.edu (Dick Crane)
Date: Tue, 26 Jul 2005 11:43:19 -0700
Subject: Tool shutdown 8/17-8/26
Message-ID: <42E68447.2090906@snf.stanford.edu>

Fab users,

STS (dep) and ag4108 disruption alert, August 17, 2005, one and a half 
weeks duration.

The ag4108 and the STS pecvd tools will be off-line for processes 
requiring ammonia gas for one and a half weeks starting around August 
17. I believe the one and a half weeks quoted is generous and the actual 
time may be less than 1  week. This schedule allows permitting and 
inspection activities to occur at the same time as needed for a 
scheduled furnace shutdown, thus minimizing overall fab downtime.

Please plan ahead for your tool needs. 

Thank you for your patience and support,

Dick

Details:

The NH3 gas cabinet supplies both the ag4108 and STS tools. NH3 gas 
lines are being extended to the ag4100 (new install) and the ALD 
(rebuilt spectrum2).  Since the toxic and house gases are regulated by 
Santa Clara County Building and Environmental Departments, all work must 
be tested and inspected according to their timetable. We will complete 
as much preliminary work as possible prior to shutting down gases.

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From pethe at stanford.edu  Thu Jul 28 10:57:15 2005
From: pethe at stanford.edu (Abhijit Pethe)
Date: Thu, 28 Jul 2005 10:57:15 -0700 (PDT)
Subject: Tray change to silicide aug 1st
Message-ID: <Pine.GSO.4.44.0507281055430.6033-100000@elaine25.Stanford.EDU>

Hi all,

I want to request for a tray change to silicide starting aug 1st.

Thanks
Abhijit





From kailash at us.ibm.com  Fri Jul 29 11:59:58 2005
From: kailash at us.ibm.com (Kailash Gopalakrishnan)
Date: Fri, 29 Jul 2005 11:59:58 -0700
Subject: Tray change to silicide aug 1st
In-Reply-To: <Pine.GSO.4.44.0507281055430.6033-100000@elaine25.Stanford.EDU>
Message-ID: <OF1F2BEC4F.41A7DBE7-ON8825704D.00685DFF-8825704D.0068810E@us.ibm.com>

Hi Abhijit,

        We would like to use the tray in clean mode on Monday morning 
extending till about 2 pm in the afternoon.     Can we have it changed to 
silicide after that?
        Thanks,
        - Kailash




Abhijit Pethe <pethe at stanford.edu> 
07/28/2005 10:57 AM

To
ag4108 at snf.stanford.edu
cc
eenriquez at snf.stanford.edu
Subject
Tray change to silicide aug 1st






Hi all,

I want to request for a tray change to silicide starting aug 1st.

Thanks
Abhijit




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