Question regarding the RTO process

Ritesh J riteshj at ee.ucla.edu
Thu Jul 14 16:52:47 PDT 2005


hello,
	i was wondering if anyone has tested the quality of the oxide
grown using the RTO process. I want to know how it compares to thermal
oxidation, (in terms of leakage and ability to be used as gate oxide).
Thanks a lot

Ritesh J




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