From pethe at stanford.edu Thu May 5 21:55:05 2005 From: pethe at stanford.edu (Abhijit Pethe) Date: Thu, 5 May 2005 21:55:05 -0700 (PDT) Subject: Silicide Change Message-ID: Hi all, I want to request for a tray change to silicide for the weekend after Robin's run. Please let me know if there are any conflicts Thanks Abhijit From anayfeh at stanford.edu Tue May 10 14:41:05 2005 From: anayfeh at stanford.edu (Ammar Munir Nayfeh) Date: Tue, 10 May 2005 14:41:05 -0700 (PDT) Subject: Diffusion Tray Tomorrow morning Message-ID: Hi Elmer, I would like a tray change to diffusion tray to use it tomorrow morning. Thanks Ammar From pethe at stanford.edu Wed May 18 16:00:30 2005 From: pethe at stanford.edu (Abhijit Pethe) Date: Wed, 18 May 2005 16:00:30 -0700 Subject: change to Silicide tray on Friday Message-ID: <000e01c55bfd$642ad7b0$296440ab@flash> Hi all, I would like to request a tray change to silicide for Friday (05/20). Hope its okay with everyone. Thanks Abhijit -------------- next part -------------- An HTML attachment was scrubbed... URL: From ratiug at stanford.edu Mon May 23 14:38:45 2005 From: ratiug at stanford.edu (Ching-Huang Lu) Date: Mon, 23 May 2005 14:38:45 -0700 Subject: Tray change to oxidation References: <000b01c52b4d$8d6d3db0$296440ab@flash> Message-ID: <001201c55fdf$cc690eb0$d06240ab@ratiug> Hi I would like to request to change the tray to oxidation this Tuesday afternoon. Please let me know if there is any conflict. Ching-Huang -------------- next part -------------- An HTML attachment was scrubbed... URL: From fengj at stanford.edu Wed May 25 21:46:06 2005 From: fengj at stanford.edu (Jia Feng) Date: Wed, 25 May 2005 21:46:06 -0700 Subject: change tray to silicide References: <002e01c53ec7$02f1eb30$296440ab@flash> Message-ID: <025401c561ad$d4639660$86b80c80@FENG> Hi, I would like to request for a tray change to silicide for Friday 10am. Thanks Jia From kailash at us.ibm.com Wed May 25 22:15:01 2005 From: kailash at us.ibm.com (Kailash Gopalakrishnan) Date: Wed, 25 May 2005 22:15:01 -0700 Subject: change tray to silicide In-Reply-To: <025401c561ad$d4639660$86b80c80@FENG> Message-ID: Hi Jia, We need to use the RTA from 12 - 3 pm on Friday in the clean (oxidation) mode. Is it ok if the RTA changes to silicide after we get done with it around 3 pm. Thanks, - Kailash "Jia Feng" 05/25/2005 09:46 PM To cc Subject change tray to silicide Hi, I would like to request for a tray change to silicide for Friday 10am. Thanks Jia -------------- next part -------------- An HTML attachment was scrubbed... URL: From fengj at stanford.edu Wed May 25 22:20:31 2005 From: fengj at stanford.edu (Jia Feng) Date: Wed, 25 May 2005 22:20:31 -0700 Subject: change tray to silicide References: Message-ID: <026801c561b2$a37390a0$86b80c80@FENG> That's fine. I have switched my reservation to Friday 5pm. Is the tray change OK with Abhijit? Thanks, Jia ----- Original Message ----- From: Kailash Gopalakrishnan To: Jia Feng Cc: ag4108 at snf.stanford.edu ; eenriquez at snf.stanford.edu ; Rohit S Shenoy Sent: Wednesday, May 25, 2005 10:15 PM Subject: Re: change tray to silicide Hi Jia, We need to use the RTA from 12 - 3 pm on Friday in the clean (oxidation) mode. Is it ok if the RTA changes to silicide after we get done with it around 3 pm. Thanks, - Kailash "Jia Feng" 05/25/2005 09:46 PM To cc Subject change tray to silicide Hi, I would like to request for a tray change to silicide for Friday 10am. Thanks Jia -------------- next part -------------- An HTML attachment was scrubbed... URL: From anayfeh at stanford.edu Fri May 27 07:28:55 2005 From: anayfeh at stanford.edu (Ammar Munir Nayfeh) Date: Fri, 27 May 2005 07:28:55 -0700 (PDT) Subject: Tray to Diffusion In-Reply-To: Message-ID: hello, I would the like the try to be in diffusion mode for the long weekend? is it going to be changed back to silicide? Ammar On Wed, 25 May 2005, Kailash Gopalakrishnan wrote: > Hi Jia, > > We need to use the RTA from 12 - 3 pm on Friday in the clean > (oxidation) mode. Is it ok if the RTA changes to silicide after we get > done with it around 3 pm. Thanks, > - Kailash > > > > > "Jia Feng" > 05/25/2005 09:46 PM > > To > > cc > > Subject > change tray to silicide > > > > > > > Hi, > > I would like to request for a tray change to silicide for Friday 10am. > > Thanks > Jia >