silicide tray on AG4108?

Carl Faulkner cmfaulkn at snf.stanford.edu
Wed Nov 30 12:18:57 PST 2005


I can use either for my Friday res. as I'm going from WBdiff-RTA-Innotec.

Carl


On Wed, 30 Nov 2005 envy at ee.ucla.edu wrote:

> Hi all
>    I needed the diffusion tray today @ 4:30 pm. Can you change it after my
> reservation?
> thanks
> Girish
> 
> > I second that. I need silicide tray for my Thu afternoon reservation from
> > 2-5pm or so.
> >
> > Thanks!
> >
> > /Chi On
> >
> >> Hello!  Elmer and AG4108 users,
> >>
> >> I am wondering if it is OK to change the AG4108 tray to silicide.
> >> Yuan and I plan to use AG4108 on 7-9pm on this Thursday for silicide.
> >> Please let us know.
> >> Elmer, if it is OK for others, could you please change the tray?
> >> Thank you very much and have a nice day!
> >>
> >> Best,
> >> Kyeongran
> >
> >
> 
> 




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