request tray change to diff

[Jia Feng]

Hi, Ali:

I have an RTA reservation on Saturday, and I will use the silicide tray. I will do RTN and then gate LTO deposition. Tylanbpsg has been fully reserved tomorrow. So I have to do it on Saturday. Do you have any flexibility, or can the tray be changed back to silicide after you use it tomorrow?

Thanks,
Jia

  ----- Original Message ----- 
  From: Ali K. Okyay 
  To: ag4108 at snf.stanford.edu 
  Cc: eenriquez at snf.stanford.edu 
  Sent: Thursday, October 20, 2005 6:31 PM
  Subject: request tray change to diff


  Hi,

   

  I would like a tray change to diffusion for the weekend. Hope this is ok with the rest.

   

  Thanks,

  Ali
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