request tray change to diff

Jia Feng fengj at
Thu Oct 20 19:17:18 PDT 2005

Hi, Ali:

I have an RTA reservation on Saturday, and I will use the silicide tray. I will do RTN and then gate LTO deposition. Tylanbpsg has been fully reserved tomorrow. So I have to do it on Saturday. Do you have any flexibility, or can the tray be changed back to silicide after you use it tomorrow?


  ----- Original Message ----- 
  From: Ali K. Okyay 
  To: ag4108 at 
  Cc: eenriquez at 
  Sent: Thursday, October 20, 2005 6:31 PM
  Subject: request tray change to diff



  I would like a tray change to diffusion for the weekend. Hope this is ok with the rest.



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