From edmyers at stanford.edu Thu Sep 1 15:09:40 2005 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 01 Sep 2005 15:09:40 -0700 Subject: RTA Forming Gas Message-ID: <6.2.1.2.2.20050901144534.04f699e0@edmyers.pobox.stanford.edu> Users, The maintenance group has completed the forming gas plumbing for the RTA4100 and ALD system. We are waiting for the county to inspect the installations prior to these tools being available to the community. As part of the installation and county certification the hydrogen content in the forming gas had to be reduced. This installation and all future installations will be using a hydrogen content of 4% instead of our previous 10% content. 4% hydrogen content is the industry standard. In part this evolved due to safety concerns over hydrogen content greater than 4%. From today and going forward the AG4108, AG4100, rtaag and rtagaas will use 4% hydrogen as the forming gas formulation. Regards, From rcrane at snf.stanford.edu Tue Sep 6 07:06:12 2005 From: rcrane at snf.stanford.edu (Dick Crane) Date: Tue, 06 Sep 2005 07:06:12 -0700 Subject: ag4100 status Message-ID: <431DA254.1040501@snf.stanford.edu> RTA users, AG4100 installation status: Excellent progress has been made toward turning on the ag4100. This recent shutdown in the diff area has allowed the process and "house" gas lines to be connected. Quartzware has been installed, it has a new operating system, and has been operationally "checked-out". Only one step remains to have the tool available for use. An enhancement in the number of available gases is requiring resubmitting plans to the county before they will sign-off on the installation. The change has minimal impact, but the county is requiring a full review. I'm estimating a two to four week delay at this time. Thanks for your patience, Dick From yzhu at ee.ucr.edu Wed Sep 14 16:47:26 2005 From: yzhu at ee.ucr.edu (yzhu at ee.ucr.edu) Date: Wed, 14 Sep 2005 16:47:26 -0700 (PDT) Subject: clean cassette request Message-ID: <61941.171.64.100.112.1126741646.squirrel@webmail.ee.ucr.edu> Hi Elmer, Could you help me to change the cassette on AG4108 at Friday early morning? I need to do some clean RTP because the wafer will go back to the clean furnace. thanks very much for you help! Coral name: yzhu Yan Zhu From riteshj at ee.ucla.edu Wed Sep 14 17:08:35 2005 From: riteshj at ee.ucla.edu (Ritesh Jhaveri) Date: Wed, 14 Sep 2005 17:08:35 -0700 (PDT) Subject: clean cassette request In-Reply-To: <61941.171.64.100.112.1126741646.squirrel@webmail.ee.ucr.edu> References: <61941.171.64.100.112.1126741646.squirrel@webmail.ee.ucr.edu> Message-ID: Hello, I need the silicide cassette till tomorrow evening and could you also replace the clean cassette wiht the silicide cassette after Zhu uses it? Thanks Ritesh J On Wed, 14 Sep 2005 yzhu at ee.ucr.edu wrote: > Hi Elmer, > > Could you help me to change the cassette on AG4108 at Friday early > morning? I need to do some clean RTP because the wafer will go back to the > clean furnace. > > thanks very much for you help! > > Coral name: yzhu > Yan Zhu > > From riteshj at ee.ucla.edu Thu Sep 15 19:03:10 2005 From: riteshj at ee.ucla.edu (Ritesh Jhaveri) Date: Thu, 15 Sep 2005 19:03:10 -0700 (PDT) Subject: Silicide Tray Message-ID: Hi, I would like the silicide tray installed in the RTA at around 2:00pm on Friday. Thank you RitesH J From rsshenoy at us.ibm.com Wed Sep 21 20:19:41 2005 From: rsshenoy at us.ibm.com (Rohit S Shenoy) Date: Wed, 21 Sep 2005 20:19:41 -0700 Subject: request for tray change to oxidation Message-ID: Hi, I would like to request that the oxidation tray be installed in the RTA for our reservation tomorrow at 2 pm. thanks, -- Rohit From riteshj at ee.ucla.edu Thu Sep 22 13:59:52 2005 From: riteshj at ee.ucla.edu (Ritesh Jhaveri) Date: Thu, 22 Sep 2005 13:59:52 -0700 (PDT) Subject: Change to silicide tray Message-ID: Hi, I request a change to silicde tray Friday evening thru the weekend. Thank You, Ritesh J From rsshenoy at us.ibm.com Wed Sep 28 10:13:47 2005 From: rsshenoy at us.ibm.com (Rohit S Shenoy) Date: Wed, 28 Sep 2005 10:13:47 -0700 Subject: request for the tray change - oxidation Message-ID: Hi, We would like to request that the oxidation tray be installed in the RTA this evening. thanks, -- Rohit