RTA Forming Gas

Ed Myers edmyers at stanford.edu
Thu Sep 1 15:09:40 PDT 2005


The maintenance group has completed the forming gas plumbing for the 
RTA4100 and ALD system.  We are waiting for the county to inspect the 
installations prior to these tools being available to the community.

As part of the installation and county certification the hydrogen content 
in the forming gas had to be reduced.  This installation and all future 
installations will be using a hydrogen content of 4% instead of our 
previous 10% content.  4% hydrogen content is the industry standard.  In 
part this evolved due to safety concerns over hydrogen content greater than 

 From today and going forward the AG4108, AG4100, rtaag and rtagaas will 
use 4% hydrogen as the forming gas formulation.


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