clean cassette request

yzhu at yzhu at
Wed Sep 14 16:47:26 PDT 2005

Hi Elmer,

Could you help me to change the cassette on AG4108 at Friday early
morning? I need to do some clean RTP because the wafer will go back to the
clean furnace.

thanks very much for you help!

Coral name: yzhu
Yan Zhu

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