clean cassette request

yzhu at ee.ucr.edu yzhu at ee.ucr.edu
Wed Sep 14 16:47:26 PDT 2005


Hi Elmer,

Could you help me to change the cassette on AG4108 at Friday early
morning? I need to do some clean RTP because the wafer will go back to the
clean furnace.

thanks very much for you help!

Coral name: yzhu
Yan Zhu




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