clean cassette request

[Ritesh Jhaveri]

Hello,
	I need the silicide cassette till tomorrow evening and could you
also replace the clean cassette wiht the silicide cassette after Zhu uses
it? Thanks

Ritesh J


On Wed, 14 Sep 2005 yzhu at ee.ucr.edu wrote:

> Hi Elmer,
>
> Could you help me to change the cassette on AG4108 at Friday early
> morning? I need to do some clean RTP because the wafer will go back to the
> clean furnace.
>
> thanks very much for you help!
>
> Coral name: yzhu
> Yan Zhu
>
>