clean cassette request

Ritesh Jhaveri riteshj at ee.ucla.edu
Wed Sep 14 17:08:35 PDT 2005


Hello,
	I need the silicide cassette till tomorrow evening and could you
also replace the clean cassette wiht the silicide cassette after Zhu uses
it? Thanks

Ritesh J


On Wed, 14 Sep 2005 yzhu at ee.ucr.edu wrote:

> Hi Elmer,
>
> Could you help me to change the cassette on AG4108 at Friday early
> morning? I need to do some clean RTP because the wafer will go back to the
> clean furnace.
>
> thanks very much for you help!
>
> Coral name: yzhu
> Yan Zhu
>
>



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