clean cassette request

Ritesh Jhaveri riteshj at
Wed Sep 14 17:08:35 PDT 2005

	I need the silicide cassette till tomorrow evening and could you
also replace the clean cassette wiht the silicide cassette after Zhu uses
it? Thanks

Ritesh J

On Wed, 14 Sep 2005 yzhu at wrote:

> Hi Elmer,
> Could you help me to change the cassette on AG4108 at Friday early
> morning? I need to do some clean RTP because the wafer will go back to the
> clean furnace.
> thanks very much for you help!
> Coral name: yzhu
> Yan Zhu

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