clean cassette request
riteshj at ee.ucla.edu
Wed Sep 14 17:08:35 PDT 2005
I need the silicide cassette till tomorrow evening and could you
also replace the clean cassette wiht the silicide cassette after Zhu uses
On Wed, 14 Sep 2005 yzhu at ee.ucr.edu wrote:
> Hi Elmer,
> Could you help me to change the cassette on AG4108 at Friday early
> morning? I need to do some clean RTP because the wafer will go back to the
> clean furnace.
> thanks very much for you help!
> Coral name: yzhu
> Yan Zhu
More information about the AG4108