robinhmb at yahoo.com
Fri Aug 18 12:21:55 PDT 2006
For anyone wanting to check the tempurature calibration on the 4108
or 4100 so they can run wafers, it's easy to diffusion clean some
lightly doped test wafers and run this recipe. Be sure to run a few
cleaned dummy wafers ahead of the real test wafers.
AG field service sent a copy of the conditions they use: O2, 1150C,
30 seconds, ramp at 100C/sec. Result should be 120A or close using
the ellipsometer program 11.
It would be good to start doing this again on a regular basis, such
as during training etc.
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