From riteshj at ee.ucla.edu  Tue Jun 12 16:33:38 2007
From: riteshj at ee.ucla.edu (Ritesh Jhaveri)
Date: Tue, 12 Jun 2007 16:33:38 -0700 (PDT)
Subject: oxynitrides in RTA 
Message-ID: <Pine.GSO.4.58.0706121627150.28078@phonon.ee.ucla.edu>

Hello,
	I was wondering if anyone has made oxy-nitrides (ultrathin) in the
RTA systems with nitrided oxide using NH3 or another gas combination. I
had a couple of questions to ask, Thank you,

Ritesh J