oxynitrides in RTA

Ritesh Jhaveri riteshj at ee.ucla.edu
Tue Jun 12 16:33:38 PDT 2007


Hello,
	I was wondering if anyone has made oxy-nitrides (ultrathin) in the
RTA systems with nitrided oxide using NH3 or another gas combination. I
had a couple of questions to ask, Thank you,

Ritesh J




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