Any Updates regarding when the machines will be up ?
edmyers at stanford.edu
Sat Nov 1 14:12:18 PDT 2008
I believe John is correct regarding the atmosphere leak remaining in
the AG4100. If anyone wishes to test the system, there is a box of
Ti wafers on the table next to the system which you can use.
As for the AG4108, John is more optimistic than I am. I'm not sure
we have completely resolved the over temperature problems as it seems
to come and go. Please test the system before you commit critical
wafers. Unfortunately, I do not have any test wafers readily
available for the system.
At 01:28 PM 11/1/2008, John Shott wrote:
>Ritesh and RTA community:
>As you are likely aware, we recently added a new heat exchanger to
>provide cooling to both the AG4100 and the AG4108. About a week
>ago, a water line in the AG4100 began leaking and both systems were
>shutdown at that time.
>We've repaired the broken line and also repaired a couple of others
>that seemed to be in a similar condition to the one that broke.
>I have cleared the AG4108 and believe that it should be fully operational.
>I've cleared the water-related shutdown on the AG4100, but will
>caution everyone that I fear that Elmer has not had time to resolve
>the air leak that has been affecting this system. Anyone that would
>be sensitive to air exposure during RTA treatement in this system
>should wait proper resolution of that issue.
>I'm hopeful that Cesar may be able to investigate that tomorrow or
>that Elmer will have time to get back to that issue on Monday.
>Let me know if you have any further questions,
More information about the AG4108