From chcheng at snf.stanford.edu  Sun Oct 15 02:44:41 2000
From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu)
Date: Oct 15, 2000 2:44:41 PM
Subject: Problem amtetcher: 
Message-ID: <mailman.51.1357938215.25670.amtetcher-pcs@snf.stanford.edu>

Showing 'Cryo Temp High' after hitting RUN



From jawad at snf.stanford.edu  Tue Oct 17 10:35:06 2000
From: jawad at snf.stanford.edu (jawad at snf.stanford.edu)
Date: Oct 17, 2000 10:35:06 AM
Subject: Problem amtetcher: 
Message-ID: <mailman.52.1357938215.25670.amtetcher-pcs@snf.stanford.edu>

Cryo pump not working
Do not use for short etches



From kalavade at snf.stanford.edu  Wed Oct 18 07:10:29 2000
From: kalavade at snf.stanford.edu (kalavade at snf.stanford.edu)
Date: Oct 18, 2000 7:10:29 PM
Subject: Shutdown amtetcher: CryoRegen
Message-ID: <mailman.53.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Thu Oct 19 02:34:33 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 19, 2000 2:34:33 PM
Subject: Shutdown Clear amtetcher: cleaned cryo roughing valve.
Message-ID: <mailman.54.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Oct 20 07:14:48 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 20, 2000 7:14:48 AM
Subject: Problem Clear amtetcher: 
Message-ID: <mailman.55.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Oct 20 07:14:55 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 20, 2000 7:14:55 AM
Subject: Problem Clear amtetcher: 
Message-ID: <mailman.56.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Oct 20 07:15:55 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 20, 2000 7:15:55 AM
Subject: Problem amtetcher: Cryopump not working-OK to use w/o cryopump
Message-ID: <mailman.57.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue Oct 24 11:15:52 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 24, 2000 11:15:52 AM
Subject: Problem Clear amtetcher: Cryopump working again - use cryopump step in all recipes again, as normal.
Message-ID: <mailman.58.1357938215.25670.amtetcher-pcs@snf.stanford.edu>




From davehong at snf.stanford.edu  Thu Oct 26 04:16:21 2000
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Oct 26, 2000 4:16:21 AM
Subject: Problem amtetcher: 
Message-ID: <mailman.59.1357938215.25670.amtetcher-pcs@snf.stanford.edu>

The AMT is down.  The display shows this error message "heat xchgr off" and would not allow me to run nor vent.  I cannot run program2  to log out.



From booth at snf.stanford.edu  Thu Oct 26 07:16:03 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 26, 2000 7:16:03 AM
Subject: Shutdown amtetcher: No Hex Flow - cooling water failed.
Message-ID: <mailman.60.1357938215.25670.amtetcher-pcs@snf.stanford.edu>