Problem Clear amtetcher: Cryopump working again - use cryopump step in all recipes again, as normal.
booth at snf.stanford.edu
booth at snf.stanford.edu
Tue Oct 24 11:15:52 PDT 2000
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Problem amtetcher: Cryopump not working-OK to use w/o cryopump
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Problem amtetcher: Cryopump not working-OK to use w/o cryopump
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Shutdown amtetcher: No Hex Flow - cooling water failed.
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