Shutdown amtetcher: No Hex Flow - cooling water failed.
booth at snf.stanford.edu
booth at snf.stanford.edu
Thu Oct 26 07:16:03 PDT 2000
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Problem Clear amtetcher: Cryopump working again - use cryopump step in all recipes again, as normal.
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Previous message:
Problem Clear amtetcher: Cryopump working again - use cryopump step in all recipes again, as normal.
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