From amol at snf.stanford.edu  Wed Apr  4 09:42:23 2001
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Apr 4, 2001 9:42:23 AM
Subject: Shutdown amtetcher 2001-04-04 09:42:22: Hexode jog not working. Bell jar stuck.
Message-ID: <mailman.99.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Hexode jog not working. Bell jar is stuck in up position.



From booth at snf.stanford.edu  Wed Apr  4 10:43:37 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 4, 2001 10:43:37 AM
Subject: Shutdown amtetcher 2001-04-04 09:42:22: Hexode jog not working. Bell jar stuck.
Message-ID: <mailman.100.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

closed bell jar & put system in pump&hold.



From mbadi at snf.stanford.edu  Wed Apr 18 07:51:36 2001
From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu)
Date: Apr 18, 2001 7:51:36 AM
Subject: Problem amtetcher 2001-04-18 07:51:34: Program 25 has been overwritten -- it is now the same as program 3.
Message-ID: <mailman.101.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From gilbert at snf.stanford.edu  Thu Apr 19 09:30:43 2001
From: gilbert at snf.stanford.edu (gilbert at snf.stanford.edu)
Date: Apr 19, 2001 9:30:43 AM
Subject: Shutdown amtetcher 2001-04-19 09:30:42: arcing on seasoning run
Message-ID: <mailman.102.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Program #3 (oxide etch). 
Electrode facing window -> bottom wafer -> top right corner
Consistent flashing seemed to be coming from the gap 
between the plates. Flashing occured approximately every 
5-10 seconds.



From latta at snf.stanford.edu  Thu Apr 19 09:41:39 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Apr 19, 2001 9:41:39 AM
Subject: Shutdown amtetcher 2001-04-19 09:30:42: arcing on seasoning run
Message-ID: <mailman.103.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Just flashing, not to worry.



From booth at snf.stanford.edu  Fri Apr 20 01:38:58 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 20, 2001 1:38:58 PM
Subject: Problem amtetcher 2001-04-18 07:51:34: Program 25 has been overwritten -- it is now the same as program 3.
Message-ID: <mailman.104.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Program #25 is in memory now.



From booth at snf.stanford.edu  Mon Apr 23 07:12:38 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 23, 2001 7:12:38 AM
Subject: Problem amtetcher 2001-04-23 07:12:37: Cryo regen is needed.
Message-ID: <mailman.105.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Apr 23 11:21:56 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 23, 2001 11:21:56 AM
Subject: Problem amtetcher 2001-04-23 07:12:37: Cryo regen is needed.
Message-ID: <mailman.106.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

cleared
Cryo regen completed.



From suzanne at snf.stanford.edu  Tue Apr 24 12:20:32 2001
From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu)
Date: Apr 24, 2001 12:20:32 PM
Subject: Shutdown amtetcher 2001-04-24 12:20:28: Panel 2 latch
Message-ID: <mailman.107.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Panel 2 latch is not flush..Tray feels tight now that I re-did it...



From booth at snf.stanford.edu  Tue Apr 24 02:48:59 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Apr 24, 2001 2:48:59 PM
Subject: Shutdown amtetcher 2001-04-24 12:20:28: Panel 2 latch
Message-ID: <mailman.108.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

could not see anything wrong with latch.
It holds the tray tight, & latch is within 1mm
of top of Hex.