Shutdown amtetcher 2001-04-19 09:30:42: arcing on seasoning run

gilbert at snf.stanford.edu gilbert at snf.stanford.edu
Thu Apr 19 09:30:43 PDT 2001


Program #3 (oxide etch). 
Electrode facing window -> bottom wafer -> top right corner
Consistent flashing seemed to be coming from the gap 
between the plates. Flashing occured approximately every 
5-10 seconds.




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