From jdas at snf.stanford.edu Tue Aug 7 08:51:52 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Aug 7, 2001 8:51:52 PM Subject: Problem amtetcher 2001-08-07 20:51:51: Message-ID: Tool is unable to attain base pressure. keeps pumping under cryo pump. From cbaxter at snf.stanford.edu Tue Aug 7 11:14:35 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 7, 2001 11:14:35 PM Subject: Shutdown amtetcher 2001-08-07 23:14:34: need to regen cryo Message-ID: From booth at snf.stanford.edu Wed Aug 8 06:52:43 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 8, 2001 6:52:43 AM Subject: Problem amtetcher 2001-08-07 20:51:51: cryo regen completed. Message-ID: From booth at snf.stanford.edu Wed Aug 8 06:52:59 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 8, 2001 6:52:59 AM Subject: Shutdown amtetcher 2001-08-07 23:14:34: need to regen cryo Message-ID: cryo regen completed. From latta at snf.stanford.edu Wed Aug 8 10:17:59 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 8, 2001 10:17:59 AM Subject: Shutdown amtetcher 2001-08-08 10:17:59: latches need adjusting... Message-ID: From booth at snf.stanford.edu Wed Aug 8 02:32:09 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 8, 2001 2:32:09 PM Subject: Shutdown amtetcher 2001-08-08 10:17:59: latches need adjusting... Message-ID: adjusted latches. From hphan at snf.stanford.edu Fri Aug 17 08:21:32 2001 From: hphan at snf.stanford.edu (Henry Phan) Date: Fri, 17 Aug 2001 08:21:32 -0700 Subject: Remove reservation at 2pm Message-ID: <3B7D367C.C2528E1@snf.stanford.edu> From ychliu at snf.stanford.edu Tue Aug 21 10:48:31 2001 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Aug 21, 2001 10:48:31 AM Subject: Shutdown amtetcher 2001-08-21 10:48:30: Arc spot found after the previous user (qwang) used it Message-ID: Arc spot on top of the front tray From cbaxter at snf.stanford.edu Tue Aug 21 12:10:25 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 21, 2001 12:10:25 PM Subject: Shutdown amtetcher 2001-08-21 10:48:30: Arc spot found after the previous user (qwang) used it Message-ID: removed top hex and scott brite arc marked. reassemble top hex. chamber is on stand by, will need to condition From jayeh at snf.stanford.edu Thu Aug 23 04:59:13 2001 From: jayeh at snf.stanford.edu (jayeh at snf.stanford.edu) Date: Aug 23, 2001 4:59:13 AM Subject: Shutdown amtetcher 2001-08-23 04:59:13: DOWN Message-ID: The AMT was down after lowering and rising the bell jars. Three of my wafers are still inside the chamber. Sorry for any inconvinience. From cbaxter at snf.stanford.edu Thu Aug 23 11:43:38 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 23, 2001 11:43:38 AM Subject: Shutdown amtetcher 2001-08-23 04:59:13: DOWN Message-ID: cryo regen completed temp @19k. also grease gear shaft From beckwith at snf.stanford.edu Thu Aug 23 01:41:38 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Aug 23, 2001 1:41:38 PM Subject: Shutdown amtetcher 2001-08-23 13:41:37: machine shut itself off Message-ID: Before using: the #2 tray clip needs to be adjusted, it is loose. I didn't get to run the conditioning program #3, someone needs to run that for 30 min. when the machine comes back up. From cbaxter at snf.stanford.edu Thu Aug 23 04:21:11 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 23, 2001 4:21:11 PM Subject: Comment amtetcher 2001-08-23 16:21:09: power off Message-ID: system shut by itself, will leave power down still tomorrow From rcrane at snf.stanford.edu Mon Aug 27 04:56:48 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 27, 2001 4:56:48 PM Subject: Shutdown amtetcher 2001-08-23 13:41:37: machine shut itself off Message-ID: testing From beckwith at snf.stanford.edu Tue Aug 28 04:33:21 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Aug 28, 2001 4:33:21 PM Subject: Comment amtetcher 2001-08-28 16:33:20: Message-ID: From beckwith at snf.stanford.edu Tue Aug 28 16:53:14 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 28 Aug 2001 16:53:14 -0700 (PDT) Subject: amtetcher cryo problems Message-ID: Folks: For some reason the cryo and the machine are not speaking to one another. Therefore: 1. All programs must be run with no cryo and the base pressure must be set at .4 (not .2). 2. The chamber pumpdown may take longer than normal especially when the bell jar has been left open for long periods of time. Hint: close the bell jar when you are not actually loading and unloading your wafers. 3. The machine may alarm during the pumpdown. Just push RUN again. You may monitor the pumpdown by pressing the pressure button (once it reaches the turbo pmpdn stage) until you see the reading for the ion guage (IG). If you have any questions about any of this please get in touch with Dick Crane or Cesar Baxter. Sharleen From rcrane at snf.stanford.edu Tue Aug 28 05:41:50 2001 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Aug 28, 2001 5:41:50 PM Subject: Shutdown amtetcher 2001-08-28 17:41:49: Low bias/rf Message-ID: From jhaydon at snf.stanford.edu Fri Aug 31 03:17:23 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 31, 2001 3:17:23 PM Subject: Shutdown amtetcher 2001-08-28 17:41:49: Low bias/rf Message-ID: power supply fixed ok to use From jhaydon at snf.stanford.edu Fri Aug 31 03:18:32 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 31, 2001 3:18:32 PM Subject: Shutdown amtetcher 2001-08-28 17:41:49: Low bias/rf Message-ID: power supply fixed ok to use