From hansen at snf.stanford.edu Sun Dec 2 03:54:44 2001 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Dec 2, 2001 3:54:44 PM Subject: Problem amtetcher 2001-12-02 15:54:43: Equipment off? Message-ID: The amtetcher was not in its usual condition when I arrived to use it on Sunday afternoon (although no one used it since Friday afternoon). The display reads AME-8100 Microetch, and the 'equipment on' button is one of the only few buttons that is lit. This suggests that perhaps the equipment was turned off? Anyways, the cryo temperature is 295 K, room temperature too. I just left the machine as it was and didn't use it. From booth at snf.stanford.edu Mon Dec 3 07:34:23 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 3, 2001 7:34:23 AM Subject: Shutdown amtetcher 2001-12-03 07:34:23: Etcher was turned OFF Message-ID: probably due to power glitch over the weekend. From booth at snf.stanford.edu Mon Dec 3 07:34:51 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 3, 2001 7:34:51 AM Subject: Problem amtetcher 2001-12-02 15:54:43: Equipment off? Message-ID: should have been a shutdown. From booth at snf.stanford.edu Mon Dec 3 11:28:03 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 3, 2001 11:28:03 AM Subject: Shutdown amtetcher 2001-12-03 07:34:23: Etcher was turned OFF Message-ID: restarted system & regened cryopump. From booth at snf.stanford.edu Tue Dec 4 03:54:55 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 4, 2001 3:54:55 PM Subject: Problem amtetcher 2001-12-04 15:54:54: turbo cooling water intermittant Message-ID: The turbo was shut off this afternoon because the process cooling water flow was not high enough. This will probably still be a problem this evening. We will get facilities to raise the cooling water flow rates tomorrow. Len From jdas at snf.stanford.edu Thu Dec 13 12:56:46 2001 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Dec 13, 2001 12:56:46 PM Subject: Shutdown amtetcher 2001-12-13 12:56:44: carbonization due to arcing on pnnel 4 Message-ID: carbonization observed on pannel 4 during pre process inspection From cbaxter at snf.stanford.edu Thu Dec 13 06:36:47 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 13, 2001 6:36:47 PM Subject: Shutdown amtetcher 2001-12-13 12:56:44: carbonization due to arcing on pnnel 4 Message-ID: cleaned a arc mark and wipe down chamber. ran 30mins o2 clean From cbaxter at snf.stanford.edu Thu Dec 13 06:36:57 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Dec 13, 2001 6:36:57 PM Subject: Problem amtetcher 2001-12-04 15:54:54: turbo cooling water intermittant Message-ID: From hphan at snf.stanford.edu Tue Dec 18 09:39:43 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Dec 18, 2001 9:39:43 AM Subject: Shutdown amtetcher 2001-12-18 09:39:41: Turbo Went Off Message-ID: From booth at snf.stanford.edu Tue Dec 18 10:28:49 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 18, 2001 10:28:49 AM Subject: Shutdown amtetcher 2001-12-18 09:39:41: Turbo Went Off Message-ID: Restarted system. From booth at snf.stanford.edu Wed Dec 19 08:03:20 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Dec 19, 2001 8:03:20 AM Subject: Shutdown amtetcher 2001-12-19 08:03:19: Annual Maintenance Message-ID: