From cbaxter at snf.stanford.edu Tue Feb 6 07:37:54 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 6, 2001 7:37:54 PM Subject: Shutdown amtetcher 2001-02-06 19:37:53: cryo on regen Message-ID: From latta at snf.stanford.edu Wed Feb 7 10:03:05 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 7, 2001 10:03:05 AM Subject: Shutdown amtetcher 2001-02-06 19:37:53: cryo on regen Message-ID: Running seasoning )Prog #3, 15 min). Pwr, press and flows fine. From beckwith at snf.stanford.edu Tue Feb 13 11:52:21 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Feb 13, 2001 11:52:21 AM Subject: Problem amtetcher 2001-02-13 11:52:20: 3 things Message-ID: 1. no monitor wafer present. 2. top clip on tray #2 probably needs to be adjusted, it is at the max. depth, I think, and cannot be corrected. 3. N2 wand is not working, can't tell if it is on or off, does not grip the wafer very well. From booth at snf.stanford.edu Tue Feb 13 02:28:33 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 13, 2001 2:28:33 PM Subject: Problem amtetcher 2001-02-13 11:52:20: 3 things Message-ID: Nancy said she will provide a monitor wafer when she can. I adjusted the latch for tray# 2. Unkinked curly hose for wafer vacuum wand - it works. From beckwith at snf.stanford.edu Wed Feb 14 11:39:49 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Feb 14, 2001 11:39:49 AM Subject: Problem amtetcher 2001-02-14 11:39:47: load complete light does not go off... Message-ID: chamber vents, door opens, light remains on; stays on until micro reset button is pushed. reflected pwr seems to be fine now. From booth at snf.stanford.edu Wed Feb 14 01:02:53 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 14, 2001 1:02:53 PM Subject: Problem amtetcher 2001-02-14 11:39:47: load complete light does not go off... Message-ID: posted to wrong equipment name. Drytek2 - the load-complete light has not always been turning off when the etch chamber has reached ATM. This does not cause any problems for the operation of the machine. Pressing Micro-reset always turns the load-complete light off, and clears memory for the next load. From latta at snf.stanford.edu Thu Feb 22 12:17:06 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 22, 2001 12:17:06 PM Subject: Problem amtetcher 2001-02-22 12:17:05: I stupidly stopped cryo regen Message-ID: System may be used without cryo in short term, but can the regen be restarted? Cesar had started it this am.... From cbaxter at snf.stanford.edu Thu Feb 22 08:29:54 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 22, 2001 8:29:54 PM Subject: Shutdown amtetcher 2001-02-22 20:29:53: started cryo regen again. now cooling down. Message-ID: From latta at snf.stanford.edu Fri Feb 23 10:49:35 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 23, 2001 10:49:35 AM Subject: Shutdown amtetcher 2001-02-22 20:29:53: started cryo regen again. now cooling down. Message-ID: Cryo ok. From latta at snf.stanford.edu Fri Feb 23 10:49:59 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 23, 2001 10:49:59 AM Subject: Problem amtetcher 2001-02-22 12:17:05: I stupidly stopped cryo regen Message-ID: Mea culpa.