Problem amtetcher 2001-02-14 11:39:47: load complete light does not go off...

booth at snf.stanford.edu booth at snf.stanford.edu
Wed Feb 14 01:02:53 PST 2001


posted to wrong equipment name.
Drytek2 - the load-complete light has not always been
turning off when the etch chamber has reached ATM.
This does not cause any problems for the operation
of the machine.  Pressing Micro-reset always turns the
load-complete light off, and clears memory for the next load.




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