From latta at snf.stanford.edu Wed Jan 3 12:20:08 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 3, 2001 12:20:08 PM Subject: Shutdown amtetcher 2001-01-03 12:20:03: Arcing Message-ID: From booth at snf.stanford.edu Fri Jan 5 03:51:37 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 5, 2001 3:51:37 PM Subject: Shutdown amtetcher 2001-01-03 12:20:03: Amtetcher is UP! Message-ID: Nancy tested process with good test wafers, and results were OK. Thermal Ox ~420 A/min Undensified LTO ~450 A/min From jennifer at snf.stanford.edu Mon Jan 8 09:28:48 2001 From: jennifer at snf.stanford.edu (jennifer at snf.stanford.edu) Date: Jan 8, 2001 9:28:48 AM Subject: Problem amtetcher 2001-01-08 09:28:47: Bell Jar not responding to close Message-ID: From booth at snf.stanford.edu Mon Jan 8 03:02:06 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 8, 2001 3:02:06 PM Subject: Problem amtetcher 2001-01-08 09:28:47: Bell Jar not responding to close Message-ID: homed hexode & bell jar closed normally. From ejwong at snf.stanford.edu Tue Jan 23 10:16:37 2001 From: ejwong at snf.stanford.edu (ejwong at snf.stanford.edu) Date: Jan 23, 2001 10:16:37 PM Subject: Problem amtetcher 2001-01-23 22:16:27: program 24 has warm step on (cool step off). Message-ID: program 24 has warm step on (cool step off). moe and i copied program 24 into process 4 and just changed process 4, so program 24 is still incorrect. From booth at snf.stanford.edu Wed Jan 24 06:49:54 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 24, 2001 6:49:54 AM Subject: Problem amtetcher 2001-01-23 22:16:27: program 24 has warm step on (cool step off). Message-ID: made changes to correct program step. From ukris at snf.stanford.edu Wed Jan 24 01:11:51 2001 From: ukris at snf.stanford.edu (ukris at snf.stanford.edu) Date: Jan 24, 2001 1:11:51 PM Subject: Problem amtetcher 2001-01-24 13:11:49: Arcing!!! Message-ID: Noticed Arcing on the AMT etcher - running "via etch" program. From booth at snf.stanford.edu Wed Jan 24 01:31:41 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 24, 2001 1:31:41 PM Subject: Problem amtetcher 2001-01-24 13:11:49: Arcing!!! Message-ID: Identified as NOT arcing!!! Real "arcing" causes permanent damage to the ardel parts on the hexode & the wafer trays. "Flashing" leaves no detectable damage. Len From booth at snf.stanford.edu Thu Jan 25 07:45:56 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 25, 2001 7:45:56 AM Subject: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1. Message-ID: From booth at snf.stanford.edu Thu Jan 25 02:04:21 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 25, 2001 2:04:21 PM Subject: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1. Message-ID: Mike Dickey removed & cleaned arced process parts. Len ran std oxide etch #3 for 30 min - looks OK. From kcheng at snf.stanford.edu Fri Jan 26 11:24:00 2001 From: kcheng at snf.stanford.edu (kcheng at snf.stanford.edu) Date: Jan 26, 2001 11:24:00 AM Subject: Problem amtetcher 2001-01-26 11:23:57: AMTetcher Message-ID: Someone left the bell jar open without any sign or enabling actions. From kcheng at snf.stanford.edu Fri Jan 26 11:33:33 2001 From: kcheng at snf.stanford.edu (kcheng at snf.stanford.edu) Date: Jan 26, 2001 11:33:33 AM Subject: Problem amtetcher 2001-01-26 11:33:32: AMTetcher Message-ID: I enable the machine and pump it down to standby mode. From booth at snf.stanford.edu Fri Jan 26 11:39:52 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 26, 2001 11:39:52 AM Subject: Problem amtetcher 2001-01-26 11:33:32: AMTetcher Message-ID: CORAL was inoperative this morning & I could not put the bell jar down to put it in standby. From booth at snf.stanford.edu Fri Jan 26 11:40:04 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 26, 2001 11:40:04 AM Subject: Problem amtetcher 2001-01-26 11:23:57: AMTetcher Message-ID: From dianhua83 at 126.com Sun Jan 7 02:07:21 2001 From: dianhua83 at 126.com (=?GB2312?B?xvPStbrDsO/K1g==?=) Date: Sun, 7 Jan 2001 18:07:21 +0800 Subject: =?GB2312?B?xvPStbrDsO/K1g==?= Message-ID: An HTML attachment was scrubbed... URL: From jin_chu_kou at 126.com Thu Jan 4 11:39:23 2001 From: jin_chu_kou at 126.com (=?GB2312?B?s/bK27rLz/q1pQ==?=) Date: Fri, 5 Jan 2001 03:39:23 +0800 Subject: =?GB2312?B?s/bK27rLz/q1pQ==?= Message-ID: An HTML attachment was scrubbed... URL: