Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1.

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Jan 25 02:04:21 PST 2001


Mike Dickey removed & cleaned arced process parts.
Len ran std oxide etch #3 for 30 min - looks OK.




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