Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1.

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Jan 25 02:04:21 PST 2001

Previous message: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1.
Next message: Problem amtetcher 2001-01-26 11:23:57: AMTetcher
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Mike Dickey removed & cleaned arced process parts.
Len ran std oxide etch #3 for 30 min - looks OK.

Previous message: Shutdown amtetcher 2001-01-25 07:45:52: Need to repair arcing at latch on tray #1.
Next message: Problem amtetcher 2001-01-26 11:23:57: AMTetcher
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the amtetcher-pcs mailing list