From hjcho at snf.stanford.edu Mon Jul 2 09:59:58 2001 From: hjcho at snf.stanford.edu (hjcho at snf.stanford.edu) Date: Jul 2, 2001 9:59:58 AM Subject: Problem amtetcher 2001-07-02 09:59:57: cabinet open error Message-ID: From booth at snf.stanford.edu Mon Jul 2 11:59:28 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 2, 2001 11:59:28 AM Subject: Problem amtetcher 2001-07-02 09:59:57: cabinet open error Message-ID: no problem found. From booth at snf.stanford.edu Wed Jul 18 07:04:52 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 18, 2001 7:04:52 AM Subject: Shutdown amtetcher 2001-07-18 07:04:52: Arcing in chamber Message-ID: From hphan at snf.stanford.edu Wed Jul 18 02:59:25 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jul 18, 2001 2:59:25 PM Subject: Shutdown amtetcher 2001-07-18 07:04:52: Arcing in chamber Message-ID: PROBLEM HAS BEEN FIXED From booth at snf.stanford.edu Wed Jul 25 06:55:58 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 25, 2001 6:55:58 AM Subject: Shutdown amtetcher 2001-07-25 06:55:56: Shutdown AMTetcher Message-ID: arcing on trays 1 & 2 in latch area. From booth at snf.stanford.edu Thu Jul 26 02:32:53 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 26, 2001 2:32:53 PM Subject: Shutdown amtetcher 2001-07-25 06:55:56: Shutdown AMTetcher Message-ID: R&R burned ardel on wafer trays 1 & 2, scrubbed burn marks from aluminum parts. Explained to Evelyn how to inspect hexode parts for proper mounting, and evidence of arcing- also told her to shutdown the machine if she sees any arcing marks.