From greene at snf.stanford.edu  Wed Jun  6 11:32:50 2001
From: greene at snf.stanford.edu (greene at snf.stanford.edu)
Date: Jun 6, 2001 11:32:50 AM
Subject: Problem amtetcher 2001-06-06 11:32:47: Hexode sticks during rotation
Message-ID: <mailman.111.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Hexode sticks during rotation.  Error: "Hexode Did Not Move".  Usually can be fixed by pressing "Jog" again, but often takes multiple tries.



From booth at snf.stanford.edu  Wed Jun  6 11:41:58 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 6, 2001 11:41:58 AM
Subject: Problem amtetcher 2001-06-06 11:32:47: Hexode sticks during rotation
Message-ID: <mailman.112.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

I'm aware of this problem & will be replacing
the hexode drive motor when time permits.



From beckwith at snf.stanford.edu  Tue Jun 19 12:33:38 2001
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jun 19, 2001 12:33:38 PM
Subject: Problem amtetcher 2001-06-19 12:33:36: 
Message-ID: <mailman.113.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Cryo is now reading 30 DEG K. Machine will start shutting off
 during etch.



From cbaxter at snf.stanford.edu  Tue Jun 19 04:25:04 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 19, 2001 4:25:04 PM
Subject: Shutdown amtetcher 2001-06-19 16:25:04: need to regen cryo
Message-ID: <mailman.114.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Jun 20 04:04:41 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 20, 2001 4:04:41 PM
Subject: Shutdown amtetcher 2001-06-19 16:25:04: need to regen cryo
Message-ID: <mailman.115.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

completed cryo regen



From cbaxter at snf.stanford.edu  Wed Jun 20 04:04:49 2001
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 20, 2001 4:04:49 PM
Subject: Problem amtetcher 2001-06-19 12:33:36: 
Message-ID: <mailman.116.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From beckwith at snf.stanford.edu  Wed Jun 20 04:47:50 2001
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jun 20, 2001 4:47:50 PM
Subject: Comment amtetcher 2001-06-20 16:47:49: Cryo after regen
Message-ID: <mailman.117.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Seasoned the chamber w/process 3 for 30 min. Ran 5 runs 
using Process 27. Cryo stayed at 22/23 DEG K throughout all
of them. Recorded the pressures during all of the runs on the
log sheet.



From dtchang at snf.stanford.edu  Fri Jun 29 11:26:20 2001
From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu)
Date: Jun 29, 2001 11:26:20 AM
Subject: Shutdown amtetcher 2001-06-29 11:26:20: power off?
Message-ID: <mailman.118.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

While I was lowering the bell jar, the power seems to have gone off.



From latta at snf.stanford.edu  Fri Jun 29 01:50:44 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jun 29, 2001 1:50:44 PM
Subject: Shutdown amtetcher 2001-06-29 11:26:20: power off?
Message-ID: <mailman.119.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Power restored.



From latta at snf.stanford.edu  Fri Jun 29 01:52:04 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Jun 29, 2001 1:52:04 PM
Subject: Shutdown amtetcher 2001-06-29 13:52:03: Low Base Plate Temp error
Message-ID: <mailman.120.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Cyro not regened after power off???



From hphan at snf.stanford.edu  Fri Jun 29 03:04:32 2001
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jun 29, 2001 3:04:32 PM
Subject: Shutdown amtetcher 2001-06-29 13:52:03: Low Base Plate Temp error
Message-ID: <mailman.121.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Re-connected.