From anolley at snf.stanford.edu  Tue Mar 13 10:37:51 2001
From: anolley at snf.stanford.edu (anolley at snf.stanford.edu)
Date: Mar 13, 2001 10:37:51 AM
Subject: Problem amtetcher 2001-03-13 10:37:49: Vacuum wand not working
Message-ID: <mailman.89.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed Mar 14 01:50:52 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 14, 2001 1:50:52 PM
Subject: Problem amtetcher 2001-03-13 10:37:49: Vacuum wand not working
Message-ID: <mailman.90.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

installed new vacuum wand assembly



From davehong at snf.stanford.edu  Fri Mar 16 08:29:02 2001
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Mar 16, 2001 8:29:02 AM
Subject: Problem amtetcher 2001-03-16 08:29:01: amt etcher stack pum leak
Message-ID: <mailman.91.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

The AMT etcher died in the middle of my etch.  I got 2 error messages ...... no chill flow , the other one is stack pump leak.  I cannot vent, either. 



From davehong at snf.stanford.edu  Fri Mar 16 08:30:39 2001
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Mar 16, 2001 8:30:39 AM
Subject: Shutdown amtetcher 2001-03-16 08:30:37: AMT is down
Message-ID: <mailman.92.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

AMT has the following problems
- no chill flow
- stack pump leak
I cannot vent and my wafers are still inside.  I will leave my wafer box next to the vacuum wand, thanks.
Dave



From latta at snf.stanford.edu  Fri Mar 16 02:10:26 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 16, 2001 2:10:26 PM
Subject: Shutdown amtetcher 2001-03-16 08:30:37: AMT is down
Message-ID: <mailman.93.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Up again.



From latta at snf.stanford.edu  Fri Mar 16 02:11:47 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 16, 2001 2:11:47 PM
Subject: Problem amtetcher 2001-03-16 08:29:01: amt etcher stack pum leak
Message-ID: <mailman.94.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

Fluid added to chiller, house N2 and chilled water problems 
fix, etcher back to normal.



From mcvittie at snf.stanford.edu  Fri Mar 16 04:03:28 2001
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Mar 16, 2001 4:03:28 PM
Subject: Shutdown amtetcher 2001-03-16 16:03:26: Shutdw to test gas in cooling water
Message-ID: <mailman.95.1357938216.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Mar 19 03:14:22 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 19, 2001 3:14:22 PM
Subject: Shutdown amtetcher 2001-03-16 16:03:26: Shutdw to test gas in cooling water
Message-ID: <mailman.96.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

replaced chilled water pneumatic valve.
Restarted system.



From mbadi at snf.stanford.edu  Sun Mar 25 04:44:34 2001
From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu)
Date: Mar 25, 2001 4:44:34 PM
Subject: Problem amtetcher 2001-03-25 16:44:33: panel reads: FORE TC < 20 MT+
Message-ID: <mailman.97.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

i hadn't seen this before so thought i'd report it.



From booth at snf.stanford.edu  Mon Mar 26 07:18:50 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 26, 2001 7:18:50 AM
Subject: Problem amtetcher 2001-03-25 16:44:33: panel reads: FORE TC < 20 MT+
Message-ID: <mailman.98.1357938216.25670.amtetcher-pcs@snf.stanford.edu>

This is normal.