Problem amtetcher 2001-03-16 08:29:01: amt etcher stack pum leak

davehong at snf.stanford.edu davehong at snf.stanford.edu
Fri Mar 16 08:29:02 PST 2001


The AMT etcher died in the middle of my etch.  I got 2 error messages ...... no chill flow , the other one is stack pump leak.  I cannot vent, either. 




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