Shutdown amtetcher 2001-03-16 08:30:37: AMT is down

davehong at snf.stanford.edu davehong at snf.stanford.edu
Fri Mar 16 08:30:39 PST 2001


AMT has the following problems
- no chill flow
- stack pump leak
I cannot vent and my wafers are still inside.  I will leave my wafer box next to the vacuum wand, thanks.
Dave




More information about the amtetcher-pcs mailing list