Shutdown amtetcher 2001-11-01 07:22:34: Tray #4 is badly arced at latch area.

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Nov 1 04:06:47 PST 2001


scrubbed/replaced damages parts
reassembled & ran process #3 for 30 min.
found O2 flow at 40 sccm & F23 flow at 60 sccm -
changed them back to normal values.




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