Cryo Pump

Henry Phan hphan at
Thu Nov 15 15:22:51 PST 2001

Dear Users:
According to Jim and Len, the cryo pump in the AMT is unnecessary use
when running process #3, which is standard oxide etch. So I changed the
recipe to skip the cryo pump. I also ran process #3 with some ox wafers.
The etch rate is the same as with the cryo. Some users might need the
cryo pump in their process. I didn't change any other processes except
process #3. If you have any questions regarding to this, please
let me know. Thank you very much!!

_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
hphan at

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