From booth at snf.stanford.edu Fri Oct 5 07:03:07 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 5, 2001 7:03:07 AM Subject: Shutdown amtetcher 2001-10-05 07:03:05: AMT was off at 6am this morning. Message-ID: From booth at snf.stanford.edu Fri Oct 5 11:58:00 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 5, 2001 11:58:00 AM Subject: Shutdown amtetcher 2001-10-05 07:03:05: AMT was off at 6am this morning. Message-ID: completed regenerating cryopump. From yyao at snf.stanford.edu Fri Oct 5 02:41:36 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Oct 5, 2001 2:41:36 PM Subject: Comment amtetcher 2001-10-05 14:41:35: program4 is bad Message-ID: From yyao at snf.stanford.edu Fri Oct 5 02:42:10 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Oct 5, 2001 2:42:10 PM Subject: Problem amtetcher 2001-10-05 14:42:09: program 4 is bad Message-ID: From hphan at snf.stanford.edu Fri Oct 5 03:36:30 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 5, 2001 3:36:30 PM Subject: Problem amtetcher 2001-10-05 14:42:09: Fixed problem Message-ID: From beckwith at snf.stanford.edu Tue Oct 9 05:21:32 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Oct 9, 2001 5:21:32 PM Subject: Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged... Message-ID: chipped in area around the ss tube, quartz spins around, will drop off completely at some point along with someone's wafer; needs to be replaced. From beckwith at snf.stanford.edu Tue Oct 9 05:22:19 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Oct 9, 2001 5:22:19 PM Subject: Comment amtetcher 2001-10-09 17:22:18: measured polymer on the monitor wafer Message-ID: average thickness is 7889A. From booth at snf.stanford.edu Wed Oct 10 02:00:32 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 10, 2001 2:00:32 PM Subject: Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged... Message-ID: installed new quartz wand tip. From tkramer at snf.stanford.edu Wed Oct 10 08:06:31 2001 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Oct 10, 2001 8:06:31 PM Subject: Comment amtetcher 2001-10-10 20:06:31: measured polymer Message-ID: Average thickness is 1530A. Next use will run program 3 and will season before using. From hphan at snf.stanford.edu Mon Oct 15 07:58:08 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2001 7:58:08 AM Subject: Shutdown amtetcher 2001-10-15 07:58:06: Regen Cryo Pump Message-ID: From hphan at snf.stanford.edu Mon Oct 15 08:44:45 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2001 8:44:45 AM Subject: Shutdown amtetcher 2001-10-15 07:58:06: Cryo Pump Regen Message-ID: From qwang at snf.stanford.edu Thu Oct 18 11:24:08 2001 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Oct 18, 2001 11:24:08 AM Subject: Shutdown amtetcher 2001-10-18 11:24:07: plasma damage on plate No.3 Message-ID: From cbaxter at snf.stanford.edu Thu Oct 18 07:36:46 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 18, 2001 7:36:46 PM Subject: Shutdown amtetcher 2001-10-18 11:24:07: plasma damage on plate No.3 Message-ID: remove top cover and scott brite arc mark on latch. installed top cover and also adjusted latch tension on tray #1. ran recipe#3 since chamber was at atm. From qwang at snf.stanford.edu Mon Oct 22 10:07:08 2001 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Oct 22, 2001 10:07:08 AM Subject: Problem amtetcher 2001-10-22 10:07:07: Cryo temp high Message-ID: I can not run process because the temperature cryo pump is too high. From hphan at snf.stanford.edu Mon Oct 22 11:18:39 2001 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 22, 2001 11:18:39 AM Subject: Problem amtetcher 2001-10-22 10:07:07: Fixed by Len Message-ID: From yyao at snf.stanford.edu Sun Oct 28 02:32:12 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Oct 28, 2001 2:32:12 PM Subject: Problem amtetcher 2001-10-28 14:32:11: burned spot on hexode one top latch Message-ID: From latta at snf.stanford.edu Mon Oct 29 05:24:36 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 29, 2001 5:24:36 PM Subject: Problem amtetcher 2001-10-28 14:32:11: burned spot on hexode one top latch Message-ID: Len scrubbed and replaced burnt ardel. Prog #3 run ofr 30 mins. Ok.