Shutdown amtetcher 2001-10-05 07:03:05: AMT was off at 6am this morning.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Oct 5 11:58:00 PDT 2001
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Shutdown amtetcher 2001-10-05 07:03:05: AMT was off at 6am this morning.
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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completed regenerating cryopump.
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Shutdown amtetcher 2001-10-05 07:03:05: AMT was off at 6am this morning.
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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