Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Tue Oct 9 05:21:32 PDT 2001


chipped in area around the ss tube, quartz spins around, will
drop off completely at some point along with someone's wafer; needs to be replaced.




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