Comment amtetcher 2001-10-09 17:22:18: measured polymer on the monitor wafer
beckwith at snf.stanford.edu
beckwith at snf.stanford.edu
Tue Oct 9 05:22:19 PDT 2001
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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Comment amtetcher 2001-10-10 20:06:31: measured polymer
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average thickness is 7889A.
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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Comment amtetcher 2001-10-10 20:06:31: measured polymer
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