Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
booth at snf.stanford.edu
booth at snf.stanford.edu
Wed Oct 10 02:00:32 PDT 2001
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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Comment amtetcher 2001-10-09 17:22:18: measured polymer on the monitor wafer
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installed new quartz wand tip.
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Problem amtetcher 2001-10-09 17:21:30: quartz part of wand damaged...
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Comment amtetcher 2001-10-09 17:22:18: measured polymer on the monitor wafer
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