Shutdown amtetcher 2001-10-18 11:24:07: plasma damage on plate No.3

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Oct 18 07:36:46 PDT 2001


remove top cover and scott brite arc mark on latch.
installed top cover and also adjusted latch tension
on tray #1. ran recipe#3 since chamber was at atm.




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