From greene at snf.stanford.edu Tue Sep 4 09:35:48 2001 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: Sep 4, 2001 9:35:48 AM Subject: Problem amtetcher 2001-09-04 09:35:47: 2x faster etch rate Message-ID: Evelyn measured an oxide etch rate yesterday that was 2x higher than before the RF problem was repaired on Friday. This was with Program #3. Selectivity may also be affected, but no tests (to my knowledge) have been performed to check this. From greene at snf.stanford.edu Tue Sep 4 10:53:12 2001 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: Sep 4, 2001 10:53:12 AM Subject: Shutdown amtetcher 2001-09-04 10:53:11: MFCs to be inspected Message-ID: From booth at snf.stanford.edu Tue Sep 4 03:51:10 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 4, 2001 3:51:10 PM Subject: Shutdown amtetcher 2001-09-04 15:51:09: already shutdown but light is green? Message-ID: From booth at snf.stanford.edu Wed Sep 5 12:39:11 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:39:11 PM Subject: Shutdown amtetcher 2001-09-04 15:51:09: already shutdown but light is green? Message-ID: From booth at snf.stanford.edu Wed Sep 5 12:40:28 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:40:28 PM Subject: Shutdown amtetcher 2001-09-04 10:53:11: MFCs to be inspected Message-ID: Nancy did etch rate tests that seem to show Tox, LTO, & Resist etch normally. Nitride is different. See e-mail notice from Nancy. From booth at snf.stanford.edu Wed Sep 5 12:40:47 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 5, 2001 12:40:47 PM Subject: Problem amtetcher 2001-09-04 09:35:47: 2x faster etch rate Message-ID: From qwang at snf.stanford.edu Wed Sep 5 07:40:13 2001 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Sep 5, 2001 7:40:13 PM Subject: Problem amtetcher 2001-09-05 19:40:10: trns power is not stable Message-ID: the TRNS power ranged from 1160 to 1180 W. There were some arcing during etching process. the window is not clear. From cbaxter at snf.stanford.edu Wed Sep 5 09:43:06 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 5, 2001 9:43:06 PM Subject: Problem amtetcher 2001-09-05 19:40:10: trns power is not stable Message-ID: removed tray#2 and adjusted latch and also ran recipe#3 plasma is stable @1150 watts From ychliu at snf.stanford.edu Fri Sep 7 09:15:45 2001 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Sep 7, 2001 9:15:45 AM Subject: Shutdown amtetcher 2001-09-07 09:15:44: Arcing spots found before seasoning Message-ID: It seems that serious arcing occurred when the previous user was using it. From ychliu at snf.stanford.edu Fri Sep 7 09:17:30 2001 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Sep 7, 2001 9:17:30 AM Subject: Shutdown amtetcher 2001-09-07 09:17:26: Arcing spots found before seasoning Message-ID: It seems that serious arcing occurred when the previous user was using it. From booth at snf.stanford.edu Fri Sep 7 09:41:54 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 7, 2001 9:41:54 AM Subject: Shutdown amtetcher 2001-09-07 09:15:44: Arcing spots found before seasoning Message-ID: duplicate shutdown message. From latta at snf.stanford.edu Fri Sep 7 03:30:35 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 7, 2001 3:30:35 PM Subject: Shutdown amtetcher 2001-09-07 09:17:26: Arcing spots found before seasoning Message-ID: Len and Mike Dickey scrubbed and reassembled trays. 60 min seasoning done. From beckwith at snf.stanford.edu Thu Sep 13 12:13:55 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Sep 13, 2001 12:13:55 PM Subject: Problem amtetcher 2001-09-13 12:13:30: high pr etch rate using program 27 Message-ID: Could someone check the calibrations for O2, CHF3, and chamber pressure? Prior to all of the equipment problems we were getting a consistant etch rate of 385A/min. Now we are getting from 450-500A/min. The etch rate also varies from one etch to the next. We need a consistant, lower etch rate for our process. Thanks. From booth at snf.stanford.edu Thu Sep 13 03:04:12 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 13, 2001 3:04:12 PM Subject: Problem amtetcher 2001-09-13 12:13:30: high pr etch rate using program 27 Message-ID: etch tests show normal rates. From balaji at snf.stanford.edu Tue Sep 18 04:24:27 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Sep 18, 2001 4:24:27 PM Subject: Problem amtetcher 2001-09-18 16:24:27: Message-ID: From suzanne at snf.stanford.edu Tue Sep 18 04:43:55 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Sep 18, 2001 4:43:55 PM Subject: Problem amtetcher 2001-09-18 16:43:50: panel 5 wafers hard to get out Message-ID: From suzanne at snf.stanford.edu Tue Sep 18 04:44:30 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Sep 18, 2001 4:44:30 PM Subject: Problem amtetcher 2001-09-18 16:44:16: wand cracked Message-ID: From cbaxter at snf.stanford.edu Tue Sep 18 06:09:49 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 18, 2001 6:09:49 PM Subject: Problem amtetcher 2001-09-18 16:44:16: wand cracked Message-ID: From cbaxter at snf.stanford.edu Tue Sep 18 06:10:29 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 18, 2001 6:10:29 PM Subject: Problem amtetcher 2001-09-18 16:43:50: panel 5 wafers hard to get out Message-ID: work's fine with me From cbaxter at snf.stanford.edu Tue Sep 18 06:10:48 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 18, 2001 6:10:48 PM Subject: Problem amtetcher 2001-09-18 16:24:27: Message-ID: shutdown wrong tool From cbaxter at snf.stanford.edu Tue Sep 25 12:08:20 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2001 12:08:20 AM Subject: Shutdown amtetcher 2001-09-25 00:08:19: power glitch.. Message-ID: cryo is in regen since 10pm From booth at snf.stanford.edu Tue Sep 25 06:51:03 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 25, 2001 6:51:03 AM Subject: Shutdown amtetcher 2001-09-25 00:08:19: power glitch.. Message-ID: Cryo regen successfull. Put system into pump & hold. From yyao at snf.stanford.edu Tue Sep 25 11:19:24 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Sep 25, 2001 11:19:24 AM Subject: Shutdown amtetcher 2001-09-25 11:19:23: cryo needs regen Message-ID: system is vented. The "run" button is not on. From booth at snf.stanford.edu Tue Sep 25 11:39:16 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 25, 2001 11:39:16 AM Subject: Shutdown amtetcher 2001-09-25 11:19:23: cryo needs regen Message-ID: User will try running recipe again.