Problem amtetcher 2001-09-04 09:35:47: 2x faster etch rate

greene at snf.stanford.edu greene at snf.stanford.edu
Tue Sep 4 09:35:48 PDT 2001


Evelyn measured an oxide etch rate yesterday that was 2x higher than before the RF problem was repaired on Friday.  This was with Program #3.  Selectivity may also be affected, but no tests (to my knowledge) have been performed to check this.




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